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Description: Estek WIS 850II
(WIS 850II)
Estek WIS 850II
* New laser has recently installed (appr cost was $10,000)
* Detection 0.17 um on Silicon at 95% capture rate.
* Verified by NIST Standards. 2 to 8 inch capable with proper setup.
* Dark and light channel system.
* Dark channel is used for detecting particles and any light scattering defects.
* Light channel is useful for detecting non-light scattering defects such as mounds,
dimples and non uniformity.
* Detects specular flaws, including large particles, mounds, dimples, saw marks,
grooves, fractures, slip, epi-spikes, small particles on large grained surfaces,
particles buried in/under a film.
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