Description: Nanometrics Nanospec AFT 215
(Nanometrics 215)
Nanometrics 215 Automated Film Thickness Tool. * Cassette to cassette operation. 3¿ to 6¿ wafer capability. * Measurement spot size 5 ¿m to 50 ¿m. * Up to 500 measurements per wafer in mapping mode. * Measures from 100 angstrom to 50,000 angstroms.
Note: See below for detailed specifications on the Nanometrics 215
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