Description: Perkin Elmer 4410
(4410)
Main Processing System w/Load Lock Large Substrate Pallet Digital Granville Phillips Ion Gauge w/TC Gauge Auto Pumpdown Control MKS Gas Control System (3 gas capability w/ 1 used) MKS Pressure Control CTI Cryo Pump w/compressor Leybold D30 Mechanical Pump RF and DC Sputter Deposition capability Capability of Round or Delta Targets Heated Load Lock 208V / 3 Phase / 60 Hz System refurbished to meet OEM specification
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