Description: Perkin Elmer 2400-8L
(2400-8L)
Perkin Elmer 2400-8L
* Load Lock Multi-Target System. * Incorporates load lock for reduced pumpdown time. * Anode/Cathode spacing is remotely adjustable. * Offers complete freedom from cross contamination. * Substrate table allows heating of pallet with rapid cooldown to ambient temperature. * Servo-Match automatic tuning. * Automated operation facilitates fast turnaround. * Perkin Elmer's 2400-8L incorporates a load lock through which wafers, to be processed, are introduced into the process chamber.
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