603-MRC 603 Sputtering/Vertical-Load Lock-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	MRC	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	603
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	126

Description: MRC 603 Sputtering/Vertical-Load Lock (603)

3 Target RF & DC Side Sputtering System with Etch. CRT screen monitoring with keyboard parameter control. Three targets 5¿ x 15.¿ Sputter etch capability. Quartz substrate heaters, substrate temperature adjustable to 400¿C. Substrate carrier 13¿ x 13.¿ Cryo pump and roughing pump.

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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