Description: Semix
(SOG TR6132UD)
Semix Model TR6132UD. System Configuration: Send>SOG>Bake>Bake>Bake. Can run 6¿ wafers there is no Cool Plates on the systems as the use a cool area to cool the wafer before loading into the cassette. Also Semix systems use pressurized dispense with no filter however a filter can be added.
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