Description: CHA SEC 1000 E-beam Evaporator
(CHA 1000)
CHA SEC 1000 E-beam Evaporator
* E-Beam Evaporator * 4 pocket * Chamber size 32" dia. X 36" tall. * Temescal 271 - 4 pocket gun * Manual rotation AutoTech II valve controller * (2) shutter controls * CTI 10 Cryo pump * CV8 Power supply Substrate heat * Gransville 307 Vacuum Gauge Controller * Gransville-Phillips Model: 307 Vacuum Gauge Controller * X,Y Sweep FDC 8000 Deposition controller
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