1511E-Tegal 1511E-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tegal	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	1511E
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	30

Description: Tegal 1511E (1511E)

Automatic optical emission type endpoint detection. Can be configured for 3" to 6" substrates. Power requirements: 208V, 3 Phase, 5 wire, 30A, 60 Hz.

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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