903E-Tegal 903E-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tegal	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	903E
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	28

Description: Tegal 903E (903E)

Tegal 903E

*Cassette To Cassette In-line Single Wafer Plasma Etcher *Capability to etch vias and contacts with anisotropic or sloped profiles
*Can handle wafers from 3¿ to 6¿
*Microprocessor control
*208 V, 50/60 Hz

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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