803-Tegal 803 Etchers-Sitek Process Solutions Inc.

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Product Details

Manufacturer:	Tegal	Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	803
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	26

Description: Tegal 803 Etchers (803)

Tegal 803 Etchers

*Inline Automatic Plasma Etcher
*Fully automatic
*Microprocessor-based plasma chemistry etcher
*Designed especially for the etching of silicon dioxide (Si02) thin film deposited on single crystal or polysilicon semiconductor wafers
*Provides up to four process gases, two process channels and a clean channel

		Specifications

Specification Url

Due to equipment location and/or prior sale, some pictures are used for "reference only."

Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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